Tutorials
Monday 25 October (Tentative Schedule)
Odeum, second floor Campus Center, WPI
8:00 am Registration and Coffee
8:40 am First Tutorial Session
Laser Confocal Microscopy- Mario Gislao, Industrial Marketing and Applications Specialist, Olympus America
Characterization of local features on functional surfaces
François Blateyron, DigitalSurf,
10:20 am Break and Exhibits and Posters
10:40 am Second Tutorial Session
Utilizing Scanning Probe Microscopy for Inspection, Measurement, and Analysis at the Nano ScaleDavid Faddis PhD, Nanosurf
Bret Lapointe, Nanosurf
Friction and Surface Texture
- Dr. Don Cohen, Michigan Metrology
12:20 pm Lunch and Exhibits and Posters
1:10 pm Third Tutorial Session
Nano- and Atom-scale Length Metrology- Dr. Ted Vorburger , NIST
Finite Element Modeling for Metrologists
- Prof. Mary Kathryn Thompson, KAIST
- Prof. John M. Thompson, Consulting Engineer
2:50 pm Break and Exhibits and posters
3:10 pm Fourth Tutorial Session
Using Statistics to Analyze Surface Measurements- Prof. Marnie Ham, University of Ontario Institute of Technology,
Fundamentals in Grinding- Bi Zhang, UConn, USA
4:50-6:00 pm Welcome reception
6:00-7:00 special Gallery opening and lab tours at Worcester Art Museum
Tentative tutorial presenters and topics to be scheduled
François Blateyron, DigitalSurf,
Abstracts and Bio Sketches
Laser Confocal Microscopy is one of the fastest growing methodologies of choice for fast, accurate and repeatable surface metrology, in application areas such as material science, microelectronics, medical manufacturing, and nano-scale technology. Unlike alternative technologies, laser confocal microscopes allow for surface metrology without any sample preparation, provide the ability to analyze specimens with high-angle slopes (ie. up to 85 deg), offer superb lateral resolution and can acquire stunning 3D color images. Further, today's Industrial-specific laser confocal microscopes are extremely user friendly, where operators can acquire images and attain accurate measurement results with minimal training. This session will provide students with a basic fundamental understanding of confocal microscopy, discuss application examples where confocal microscopy is prevalent, advantages / disadvantages in comparison with alternative methodoliges of surface metrology and discuss accuracy and repeatability of the laser confocal microscope. The hands-on session will follow, demonstrating laser confocal microscopy in a practical environment.
Mario J. Gislao is currently employed by Olympus America as an Industrial Marketing and Applications Specialist, and has been within the Olympus organization for half a decade. He possesses a dozen years of experience within the field of Industrial Microscopy and Metrology. Mario offers a diverse blend of expertise in the areas of technical marketing, sales and business development. During his time with Olympus, Mario’s product management, marketing and sales support efforts have resulted in consistent growth in their field of Industrial and Material Science Image-Analysis. He holds a degree in Electrical Engineering Technology from the State University of New York and resides in the New York City suburbs.
David Faddis PhD, Director of Technology and Applications, Nanosurf Inc.
Brent LaPointe , North East Sales, Nanosurf Inc.
Many of today’s high-tech products rely on nano-level functional structures, and in products such as mobile phones and integrated circuits they have already become commonplace. With increasing demands on products and their quality, small structures and the ability to evaluate them are also becoming decisive factors for the production of everyday products.
Since the introduction of the AFM in 1985 by Binning and Quate, the window to the nanoscale world was opened. The utility of Scanning Probe Microscopy has grown beyond its origins to encompass analyses of areal roughness, tribology, and probe-sample interactions involving conductivity, magnetic force, thermal conductivity, biological spectroscopy, and analysis of single molecules.
Understanding how and when to apply these varied techniques is of great importance in metrology, research and development, and in production, for quality control. This presentation will compare and contrast these methodologies, examine the data that each provides, and detail supporting case studies.
We will quantitatively evaluate how areal roughness will influence the efficiency of a solar cell, how ball point pens and paper may be evaluated to improve writing performance, and examine how processing steps can influence the nanoscale feature quality of finished goods. We will also examine how more advanced techniques such as Kelvin Probe Force Microscopy (KPFM), Magnetic Force Microscopy (MFM), and Scanning Thermal (SThM) can be used to further elucidate the link between nanoscale structure and the macroscopic features/quality of a product. Following the tutorial, we will be available to demonstrate select SPM techniques with prepared substrates.
David Faddis PhD, Polymer Science, University of Akron
Director of Technology and Applications, Nanosurf Inc.
15+ years experience in AFM industry in management and applications development
Brent LaPointe
North East Sales, Nanosurf Inc.
10+ years experience in biological and systems engineering and micro fluidics
Friction
and Surface Texture
Donald K. Cohen
Michigan Metrology, LLC
Understanding the relationship between the surface texture and friction
has
been a challenge for many centuries. Many theories have been proposed
and
either validated or dismissed based on experimental results. With the
advent of
advanced surface metrology tools, the nature of the sliding interface
is being
further understood. This presentation will review the historical
thinking about
friction leading to the seminal research in the mid 20th
century by
Bowden and Tabor and the subsequent work by Geenwood and Williamson.
The
friction of lubricated systems and surface texture will also be
presented
including a demonstration of
direct numerical modeling techniques.
Using Statistics to Analyze Surface Measurements
Prof. Marnie Ham,
University of Ontario Institute of Technology
Objective - The objective is to present methods of applying statistical techniques for determining significant differences in surface topography, both using small data sets and large data sets.
Importance - Assist researchers and engineers in determining a way to use statistics to define how different surfaces are or to determine if there is a measurable difference in the surfaces.
Topics - Basic review of statistics (i.e., normal vs non-normal, continuous vs discrete, mean, median, etc.) - application of statistics to surface topography.
Case Studies - We will look at statistics have been used in surface research Common Mistakes and Pitfall - We will look at issues that have arisen through the improper use of statistics or the use of no statistics.
Dr Ham is an Assistant Professor of Engineering at University of Ontario Institute of Ontario, Oshawa, Ontario, Canada. She is a graduate of GMI Engineering & Management Institute (Flint, Mi) and Queen’s University. She is a Professional Engineer in the Province of Ontario, since 1999. Dr Ham holds a Black Belt in Six Sigma.Nano- and Atom-scale Length Metrology
T.V.
Vorburger, R.G. Dixson, N.G. Orji, J. Fu, R.A. Allen, M.W. Cresswell,
and V.A. Hackley
National
Institute
of Standards
Gaithersburg , MD 20899 , USA
·
The
ability to
manufacture smaller linewidths leads to semiconductors with increased
performance. However, control of
linewidth requires accurate measurement to determine whether
specifications are
met. NIST has developed physical
standards with linewidths ranging from about 70 nm to about 225 nm. These lines are fabricated in single crystal
silicon using directional etching techniques to produce vertical
sidewalls and
uniform widths. The lines have been
calibrated
by critical dimension atomic force microscopes (CD-AFMs) with probe-tip
offsets
calibrated by high-resolution transmission electron microscopy (TEM). The combined standard uncertainty of the
calibrated linewidths is as small as ±1 nm.
·
Commercial
step
heights as small as about 8 nm provide a source of calibration for AFMs
used to
measure surface roughness and step heights. For calibration of smaller
heights,
we have performed measurements of the lattice-based step height on the
Si (111)
crystal surface using a calibrated AFM (C-AFM). When
combined with values derived from other
measurements, this leads to a recommended value of the Si (111) step
height of
312 pm ±
12 pm, which is
useful for calibrating atomic force microscopes working at their
highest levels
of magnification. We have also used the
C-AFM to calibrate lattice-based, 1 nm step-height standards
fabricated
from SiC at the National Aeronautics and
·
NIST
has
participated with other national measurement institutes (NMIs) in three
supplementary international comparisons in nanometrology.
The results are published on a Website of the
International Bureau of Weights and Measures (www.bipm.org)
along with similar comparisons in other fields to show the degree of
consistency between measurements of the NMIs. We discuss here the
results of
the comparisons for pitch, step height, and crossed-grating angle.
·
NIST
has
developed gold particle size references for use in the biomedical
industries.
These are Reference Materials 8011, 8012, and 8013, with nominal
particle sizes
of 10 nm, 30 nm, and 60 nm respectively. NIST has used widely different
techniques
to measure them. Dimensional reference
values are reported for the mean particle diameters in different
environments: solution,
as an aerosol, and deposited on a substrate.
The techniques include AFM, TEM, scanning electron microscopy,
electrospray-differential
mobility analysis, dynamic light scattering, and small-angle x-ray
scattering.
Theodore Vorburger is a Guest Researcher and Former Group Leader of the Surface and Microform Metrology Group in the Precision Engineering Division at the National Institute of Standards and Technology. This group is responsible for surface roughness and step height calibrations, which underpin the
Finite Element Modeling for Metrologists
John M. Thompson, Consulting Engineer
Although surface metrology is often
used in
manufacturing to verify that surface finishes and small scale
geometries have
been correctly fabricated, it is equally useful in the design of
components and
systems where the behavior is dominated by the surface. Numerical
modeling
techniques, like the finite element method, can be used to predict the
performance
of functional surfaces. It can also be used to propose alternative
surface
geometries or surface finishing techniques to improve that performance.
Korea Advanced Institute of Science and Technology
373-1 Guseong-Dong, Yuseong-Gu, Daejeon 305-701
Republic of Korea (South Korea)
Email: mkt@kaist.edu
Tel: (82)+42-350-3628
MARY KATHRYN THOMPSON is an
Assistant Professor in the Department of Civil and Environmental
Engineering at
the Korea Advanced Institute of Science and Technology. She is the
director of
the KAIST Laboratory for Innovative Design and Engineering Analysis
where she
is pioneering finite element modeling of surface phenomena. She also
holds
joint appointments in the Mechanical Engineering, Ocean Systems
Engineering,
and Industrial Design Departments at KAIST. Prof. Thompson earned her
BS, MS,
and PhD in Mechanical Engineering from the Massachusetts Institute of
Technology (MIT).
This tutorial will cover the fundamental issues in grinding. The topics include:
1. Grinding kinematics
2. Abrasive-workpiece interactions and material compatibility
3. Grinding wheel properties
4. Grinding wheel truing and dressing
5. Ground workpiece evaluation
6. Case study: grinding of ceramic materials
The tutorial will be
oriented towards industrial engineers
and academic researchers who have limited knowledge on grinding. It
will last
for about 2 hours. Handouts will be provided.